Solution : https://service.sap.com/sap/support/notes/319938 (SAP Service marketplace login required)
Key words : 
internal sap make process, additional key words r3check, r3check delivered, r3check program, cluster table, decompression error, configuration error, incorrect library, solution obtain, recent version
Related Notes : 
       
| 89384 | Checking cluster tables with R3check |